How to make a check box of three states

I want to make a filter using a checkbox with three states (one for online users / another for offline and the third for all) for now I have successfully made a checkbox for filtering on an off elements but I want to use checkbox inseated of my normal checkbox.

<mat-header-cell *matHeaderCellDef fxHide fxShow.gt-sm>Etat d'inst
                        <mat-checkbox [checked]="isSelected" (change)="onCheckboxChangeFn($event)" class="check_box_header"></mat-checkbox>
                    </mat-header-cell>
                    <mat-cell *matCellDef="let element" fxHide fxShow.gt-sm>